A Practical OEM Checklist for Specifying a Kapton Heater
https://blogfreely.net/hithimeesi/common-wafer-heater-design-challenges-in-semiconductor-equipment
In precision instruments, a kapton heater must deliver heat in a controlled way. It uses a resistive foil circuit laminated within polyimide film. One useful trait is custom circuit patterns. Still, hot spots can change the result